Design, fabrication and characterization of 1.0 μm Gap Al based interdigitated electrode for biosensors
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Title
Design, fabrication and characterization of 1.0 μm Gap Al based interdigitated electrode for biosensors
Authors
Keywords
Versus Measurement, Active Surface Area, SiO2 Layer, Interdigitated Electrode, Finger Width
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 23, Issue 10, Pages 4501-4507
Publisher
Springer Nature
Online
2017-03-20
DOI
10.1007/s00542-017-3373-1
References
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