Journal
MICROSCOPY RESEARCH AND TECHNIQUE
Volume 80, Issue 6, Pages 590-598Publisher
WILEY
DOI: 10.1002/jemt.22834
Keywords
imaging theory; microscopy; resolution; super-resolution
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Many papers have claimed the attainment of super-resolution, i.e. resolution beyond that achieved classically, by measurement of the profile of a feature in the image. We argue that measurement of the contrast of the image of a dark bar on a bright background does not give a measure of resolution, but of detection sensitivity. The width of a bar that gives an intensity at the center of the bar of 0.735 that in the bright region (the same ratio as in the Rayleigh resolution criterion) is lambda/(13.9xnumerical aperture) for the coherent case with central illumination. This figure, which compares with lambda/(numerical aperture) for the Abbe resolution limit with central illumination, holds for the classical case, and so is no indication of super-resolution. Theoretical images for two points, two lines, arrays of lines, arrays of bars, and grating objects are compared. These results can be used a reference for experimental results, to determine if super-resolution has indeed been attained. The history of the development of the theory of microscope resolution is outlined.
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