Computer simulations analysis for determining the polarity of charge generated by high energy electron irradiation of a thin film

Published 2017 View Full Article

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Title
Computer simulations analysis for determining the polarity of charge generated by high energy electron irradiation of a thin film
Authors
Keywords
Hole-free phase plate, Volta phase plate, Radiation damage, Electron beam induced charging, Thon rings, Fresnel images
Journal
MICRON
Volume 100, Issue -, Pages 10-22
Publisher
Elsevier BV
Online
2017-04-04
DOI
10.1016/j.micron.2017.03.015

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