High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Published 2017 View Full Article

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Title
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Authors
Keywords
Hot embossing, Nanoimprint, Microcasting, Metal gratings, Au80Sn20 eutectic alloy, High aspect ratio gratings, X-ray optics
Journal
MICROELECTRONIC ENGINEERING
Volume 176, Issue -, Pages 6-10
Publisher
Elsevier BV
Online
2017-01-05
DOI
10.1016/j.mee.2016.12.032

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