Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

Published 2017 View Full Article

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Title
Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
Authors
Keywords
SU-8, CAR44, UV-PDMS, 3D structures, VUV treatment, Thermal imprint, Sacrificial mould technique
Journal
MICROELECTRONIC ENGINEERING
Volume 176, Issue -, Pages 22-27
Publisher
Elsevier BV
Online
2017-01-13
DOI
10.1016/j.mee.2017.01.009

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