CuO embedded silica nanoparticles for tungsten oxidation via a heterogeneous Fenton-like reaction

Published 2017 View Full Article

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Title
CuO embedded silica nanoparticles for tungsten oxidation via a heterogeneous Fenton-like reaction
Authors
Keywords
Silica, Fenton reaction, Hydroxyl radical, Tungsten oxidation, Chemical mechanical planarization
Journal
MICROELECTRONIC ENGINEERING
Volume 183-184, Issue -, Pages 58-63
Publisher
Elsevier BV
Online
2017-10-13
DOI
10.1016/j.mee.2017.10.004

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