Fabrication of top-down gold nanostructures using a damascene process

Published 2017 View Full Article

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Title
Fabrication of top-down gold nanostructures using a damascene process
Authors
Keywords
Gold, Chemical mechanical planarization, Removal rate, Damascene, Micro-nano-structures
Journal
MICROELECTRONIC ENGINEERING
Volume 177, Issue -, Pages 41-45
Publisher
Elsevier BV
Online
2017-02-05
DOI
10.1016/j.mee.2017.02.005

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