Pulsed DC magnetron sputtering deposition of crystalline photocatalytic titania coatings at elevated process pressures

Published 2017 View Full Article

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Title
Pulsed DC magnetron sputtering deposition of crystalline photocatalytic titania coatings at elevated process pressures
Authors
Keywords
Titanium dioxide, Magnetron sputtering, Pressure effect, N-doping, Methylene blue, Stearic acid
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 71, Issue -, Pages 188-196
Publisher
Elsevier BV
Online
2017-08-05
DOI
10.1016/j.mssp.2017.07.028

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