Comparative study of threading dislocations in GaN epitaxial layers by nondestructive methods

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Title
Comparative study of threading dislocations in GaN epitaxial layers by nondestructive methods
Authors
Keywords
Gallium nitride, Threading dislocations, Screw/edge, X-ray rocking curves
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 57, Issue -, Pages 32-38
Publisher
Elsevier BV
Online
2016-10-14
DOI
10.1016/j.mssp.2016.09.021

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