Simultaneous DualEELS and EDS analysis across the ohmic contact region in 3D NAND storage and FinFET electronic devices

Published 2017 View Full Article

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Title
Simultaneous DualEELS and EDS analysis across the ohmic contact region in 3D NAND storage and FinFET electronic devices
Authors
Keywords
TEM, STEM, NAND, FINFET, EELS, EDS
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 65, Issue -, Pages 44-48
Publisher
Elsevier BV
Online
2016-12-24
DOI
10.1016/j.mssp.2016.10.053

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