The investigation of hydrogen gas sensing properties of SAW gas sensor based on palladium surface modified SnO 2 thin film

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Title
The investigation of hydrogen gas sensing properties of SAW gas sensor based on palladium surface modified SnO 2 thin film
Authors
Keywords
Surface acoustic wave, Hydrogen gas sensor, Palladium surface modification, SnO, 2, thin film, Magnetron sputtering method
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 60, Issue -, Pages 16-28
Publisher
Elsevier BV
Online
2016-12-24
DOI
10.1016/j.mssp.2016.11.042

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