Argon plasma treatment of silicon nitride (SiN) for improved antireflection coating on c-Si solar cells

Published 2017 View Full Article

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Title
Argon plasma treatment of silicon nitride (SiN) for improved antireflection coating on c-Si solar cells
Authors
Keywords
Argon plasma treatment, Silicon nitride, Silicon oxynitride, Double layer anti-reflection coating, PECVD, Solar cell
Journal
Materials Science and Engineering B-Advanced Functional Solid-State Materials
Volume 215, Issue -, Pages 29-36
Publisher
Elsevier BV
Online
2016-11-15
DOI
10.1016/j.mseb.2016.11.003

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