Fast fabrication of TiO 2 hard stamps for nanoimprint lithography

Published 2017 View Full Article

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Title
Fast fabrication of TiO 2 hard stamps for nanoimprint lithography
Authors
Keywords
Nanoimprinting lithography, TiO, 2, hard stamp, Sol-gel, Mechanical durability
Journal
MATERIALS RESEARCH BULLETIN
Volume 90, Issue -, Pages 253-259
Publisher
Elsevier BV
Online
2017-03-08
DOI
10.1016/j.materresbull.2017.03.010

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