Article
Engineering, Electrical & Electronic
Dongjoo Shin, Kwangsu Kim, Youngki Ahn, Taesung Kim
Summary: Polysilicon etching in patterned wafers is a crucial process that requires the complete removal of polysilicon without damaging the gaps made from SiO2 or Si3N4. Wet etching with alkaline solutions such as ammonium hydroxide (AH) and tetramethylammonium hydroxide (TMAH) was used in this study. The etch rate of polysilicon was most affected by the chemical concentration, particularly the concentration of hydroxide ions. TMAH demonstrated a significantly higher etch rate compared to AH. The electrical double layer (EDL) was influenced by the hydroxide concentration, making TMAH more effective in etching polysilicon in narrow gaps. An additive was also used to decrease the SiO2 etch rate and increase selectivity between polysilicon and SiO2.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2022)
Article
Engineering, Electrical & Electronic
Zhitian Shi, Konstantins Jefimovs, Marco Stampanoni, Lucia Romano
Summary: This paper introduces a method for realizing protruding sharp silicon nanopillar arrays by using displacement Talbot lithography combined with metal-assisted chemical etching in the gas phase. This combination allows for reliable and low-cost fabrication of large-scale ordered nanopillar arrays. Incorporating controlled uniformity of feature size, spatial frequency doubling, and high resolution of Talbot lithography, this proposed method provides an easy-to-scale-up processing for producing silicon pillar arrays for valuable applications in both micro and nano scales.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2023)
Article
Materials Science, Multidisciplinary
David Bischof, Michael Kahl, Markus Michler
Summary: A method for selectively etching borosilicate glass using laser and wet chemical etching was presented in this study. The selectivity was analyzed based on laser parameters, and a high selectivity of up to 540 was observed. Manufacturing capabilities for three-dimensional free form shapes in BF33 were demonstrated and compared with fused silica.
OPTICAL MATERIALS EXPRESS
(2021)
Article
Chemistry, Multidisciplinary
Khakimjon Saidov, Ivan Erofeev, Zainul Aabdin, Antoine Pacco, Harold Philipsen, Antony Winata Hartanto, Yifan Chen, Hongwei Yan, Weng Weei Tjiu, Frank Holsteyns, Utkur Mirsaidov
Summary: A method of precise and uniform wet etching for molybdenum (Mo) and other metals is presented, which overcomes the challenge of non-uniform etch profiles in wet chemical etching of polycrystalline metals. This method combines multiple cycles of cryo-oxidation and selective oxide dissolution to achieve the desired smooth and uniform nanostructures.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Engineering, Electrical & Electronic
S. Purohit, V Swarnalatha, A. K. Pandey, R. K. Sharma, P. Pal
Summary: This research investigates the etching characteristics of Si{110} in 10 M sodium hydroxide with and without the addition of hydroxylamine (NH2OH). The incorporation of NH2OH significantly improves the etch rate and the corner undercutting. The findings are useful for scientists and engineers in the fabrication of MEMS structures using wet anisotropic etching and have the potential to promote the application of wet etching in MEMS.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2022)
Article
Chemistry, Multidisciplinary
Arrate Santaolalla, Yara Alvarez-Brana, Astrid Barona, Lourdes Basabe-Desmonts, Fernando Benito-Lopez, Naiara Rojo
Summary: Biomachining has emerged as a sustainable and effective method for producing microfluidic devices by molding polymeric materials. A novel process using a combined Pressure Sensitive Adhesive mask and varnish has been proposed as an alternative to photolithography for preparing metal workpieces. Metal solubilization has been shown to be repeatable in consecutive mold-etching stages, and the lifespan of the biomachining medium has been prolonged through the use of a regenerated oxidant solution. The bio-engraved copper pieces have been successfully used as molds for self-powered polydimethylsiloxane microfluidic devices, demonstrating the effectiveness and eco-friendliness of this biomachining application.
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
(2023)
Article
Engineering, Electrical & Electronic
Jong Beom Jang, Sontyana Adonijah Graham, Jae Su Yu
Summary: This study developed a simple pendulum-type TENG that efficiently harvests oscillating motion and has potential applications in powering electronic devices and angle detection.
ACS APPLIED ELECTRONIC MATERIALS
(2022)
Article
Materials Science, Multidisciplinary
Subrata Mandal, Chirantan Das, Subhrajit Sikdar, Basudev Nag Chowdhury, Pintu Singha, Aritra Banerjee, Anupam Karmakar, Sanatan Chattopadhyay
Summary: In this study, a substrate engineered patterned array of square-shaped features of size 1.5 μm x 1.5 μm, comprising of <111>/[100]-planes of p-Si substrate, was successfully developed using electron beam lithography assisted selective anisotropic wet etching. The exposed <111>/[100]-planes were confirmed by FESEM imaging and X-ray diffraction study. The surface engineered Si-substrates have potential applications in electronic, optoelectronic, and bio-sensing devices.
MATERIALS CHEMISTRY AND PHYSICS
(2022)
Article
Nanoscience & Nanotechnology
Lei Wu, Licong Cui, Wang He, Jian Guo, Bingjun Yu, Linmao Qian
Summary: This study systematically investigates the roles of mechanically driven defects in wet etching and reveals the antietching role of mechanically driven amorphous Si (a-Si) and the promoting etching role of distorted Si. Selective etching mechanisms for each defect are addressed based on the proposed dissolution model.
ACS APPLIED MATERIALS & INTERFACES
(2022)
Article
Chemistry, Physical
Shengli Xie, Jianxia Gou, Yingyuan Zhao, Weimin Zhao, Zhijie Gao
Summary: Alpha-NixCo(1-x)(OH)(2) was successfully synthesized by etching ZIF-67, and it was found that the reaction temperature affects the morphology and composition of the product. Hydroxide nanocluster can be formed at lower temperature, while hydroxide hollow nanocage can be obtained at or exceeding 100 degrees C. The versatile synthesis strategy allows for the recycling of organic ligand.
JOURNAL OF ALLOYS AND COMPOUNDS
(2022)
Article
Chemistry, Multidisciplinary
Rongjin Zhuang, Jinze He, Yifan Qi, Yang Li
Summary: Thin-film lithium niobate (TFLN) has excellent optical properties and is widely used in various electro-optic and acousto-optic devices. This study developed a wet etching method for TFLN, enabling the fabrication of high-quality micro-racetracks with customized coupling conditions. The method offers high throughput, reproducibility, and cost-efficiency, showing great potential for mass production of integrated LN photonic devices.
ADVANCED MATERIALS
(2023)
Article
Engineering, Electrical & Electronic
Yang Liu, Lai Wang, Yuantao Zhang, Xin Dong, Xiankai Sun, Zhibiao Hao, Yi Luo, Changzheng Sun, Yanjun Han, Bing Xiong, Jian Wang, Hongtao Li
Summary: In this study, a high-performance Ga2O3-based heterojunction diode was successfully fabricated using lift-off and transfer-print techniques. The diodes exhibited excellent electrical properties, indicating a new pathway for the fabrication of Ga2O3 heterojunctions and bipolar devices.
IEEE ELECTRON DEVICE LETTERS
(2021)
Article
Nanoscience & Nanotechnology
Liang Xu, Liping Qi, Kehong Li, Helin Zou
Summary: Electrohydrodynamic jet (E-jet) printing is a promising technology for efficient and cost-effective high-resolution nanomanufacturing. This study focuses on the development of a fabrication process for nanoscale printing nozzles. A silicon nano nozzle mold was fabricated, and a nanoscale polymer nozzle was produced for E-jet printing. The results demonstrate that the polymer nano nozzle can achieve fine resolution printing.
ACS APPLIED NANO MATERIALS
(2023)
Article
Materials Science, Ceramics
Balanand Santhosh, Anna Galotta, Gian Domenico Soraru, Vincenzo M. Sglavo, Mattia Biesuz
Summary: This study focuses on the cold sintering of colloidal silica particles using different alkaline solutions as the transient phase. Optimal densification was achieved under a pressure of 500 MPa. The resulting sintered materials have low corrosion in water. Delayed densification was observed in the LiOH system compared to KOH and NaOH.
CERAMICS INTERNATIONAL
(2022)
Article
Chemistry, Physical
E. Cheng, Suzhou Tang, Lingpeng Liu, Helin Zou, Zhengyan Zhang
Summary: UV lithography parameters were optimized to achieve a significant decrease in the width dimension of photoresist patterns from microscale to nano-scale. The influences of etching time on SiO2 film over-etching amount and nano-mold depth were analyzed to further reduce the width of nano-mold. Additionally, the effect of photoresist mesas deformation on nano-mold fabrication was studied to improve the quality of nano-mold.
SURFACE REVIEW AND LETTERS
(2021)
