Calibration of a scanning electron microscope from two coordinates

Authors

Keywords

scanning electron microscope, SEM, calibration, test object, pixel size, beam diameter, beam asymmetry

Journal

Journal of Surface Investigation-X-Ray Synchrotron and Neutron Techniques

Volume 11, Issue 4, Pages 890-896

Publisher

Pleiades Publishing Ltd

Online

2017-08-23

DOI

10.1134/s1027451017040255

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