Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O3 as Oxygen Sources

Published 2017 View Full Article

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Title
Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O3 as Oxygen Sources
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 121, Issue 32, Pages 17498-17504
Publisher
American Chemical Society (ACS)
Online
2017-07-28
DOI
10.1021/acs.jpcc.7b05240

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