A circumferential antenna ellipsoidal cavity type MPCVD reactor developed for diamond film deposition

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Title
A circumferential antenna ellipsoidal cavity type MPCVD reactor developed for diamond film deposition
Authors
Keywords
Diamond films, MPCVD reactor, Microwave electric field, Ellipsoidal cavity, Circumferential antenna
Journal
DIAMOND AND RELATED MATERIALS
Volume 51, Issue -, Pages 24-29
Publisher
Elsevier BV
Online
2014-11-12
DOI
10.1016/j.diamond.2014.11.004

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