Fabrication of Highly Ordered Silicon Nanowires by Metal Assisted Chemical Etching Combined with a Nanoimprinting Process

Published 2017 View Full Article

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Title
Fabrication of Highly Ordered Silicon Nanowires by Metal Assisted Chemical Etching Combined with a Nanoimprinting Process
Authors
Keywords
-
Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 17, Issue 10, Pages 7771-7774
Publisher
American Scientific Publishers
Online
2017-07-23
DOI
10.1166/jnn.2017.14837

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