Miniaturized Diaphragm Vacuum Pump by Multi-Material Additive Manufacturing

Published 2017 View Full Article

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Title
Miniaturized Diaphragm Vacuum Pump by Multi-Material Additive Manufacturing
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 26, Issue 6, Pages 1316-1326
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-09-07
DOI
10.1109/jmems.2017.2743020

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