A Monolithic Approach to Downscaling Silicon Piezoresistive Sensors

Published 2017 View Full Article

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Title
A Monolithic Approach to Downscaling Silicon Piezoresistive Sensors
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 26, Issue 3, Pages 624-631
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-03-31
DOI
10.1109/jmems.2017.2679219

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