A high-density, super-high-aspect-ratio microprobe array realized by high-frequency vibration assisted inverse micro w-EDM

Published 2017 View Full Article

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Title
A high-density, super-high-aspect-ratio microprobe array realized by high-frequency vibration assisted inverse micro w-EDM
Authors
Keywords
High-frequency vibration assistance, Super-high-aspect-ratio, Microprobe array
Journal
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 250, Issue -, Pages 144-155
Publisher
Elsevier BV
Online
2017-07-11
DOI
10.1016/j.jmatprotec.2017.07.014

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