Microstructure and Electrical Properties of Antimony Telluride Thin Films Deposited by RF Magnetron Sputtering on Flexible Substrate Using Different Sputtering Pressures

Title
Microstructure and Electrical Properties of Antimony Telluride Thin Films Deposited by RF Magnetron Sputtering on Flexible Substrate Using Different Sputtering Pressures
Authors
Keywords
Antimony telluride, RF magnetron sputtering, sputtering pressure, thermoelectric
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 46, Issue 5, Pages 3166-3171
Publisher
Springer Nature
Online
2017-02-02
DOI
10.1007/s11664-017-5303-5

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