Field modeling and ray-tracing of a miniature scanning electron microscope beam column

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Title
Field modeling and ray-tracing of a miniature scanning electron microscope beam column
Authors
Keywords
-
Journal
Microscopy
Volume 66, Issue 4, Pages 245-253
Publisher
Oxford University Press (OUP)
Online
2018-02-01
DOI
10.1093/jmicro/dfx010
References
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