High-quality AlN template grown on a patterned Si(111) substrate

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Title
High-quality AlN template grown on a patterned Si(111) substrate
Authors
Keywords
MOCVD, AlN, Pattern, Si, LEDs
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 468, Issue -, Pages 225-229
Publisher
Elsevier BV
Online
2016-12-28
DOI
10.1016/j.jcrysgro.2016.12.100

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