Calibration-free quantitative analysis of thin-film oxide layers in semiconductors using laser induced breakdown spectroscopy (LIBS)
Published 2017 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Calibration-free quantitative analysis of thin-film oxide layers in semiconductors using laser induced breakdown spectroscopy (LIBS)
Authors
Keywords
-
Journal
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
Volume 32, Issue 7, Pages 1378-1387
Publisher
Royal Society of Chemistry (RSC)
Online
2017-05-23
DOI
10.1039/c7ja00083a
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- In-vitro analysis of early calcification in aortic valvular interstitial cells using Laser-Induced Breakdown Spectroscopy (LIBS)
- (2017) Seyyed Ali Davari et al. Journal of Biophotonics
- Calibration-free quantitative analysis of elemental ratios in intermetallic nanoalloys and nanocomposites using Laser Induced Breakdown Spectroscopy (LIBS)
- (2017) Seyyed Ali Davari et al. TALANTA
- Investigation of Leakage Current Mechanisms in La2O3/SiO2/4H-SiC MOS Capacitors with Varied SiO2 Thickness
- (2016) Yucheng Wang et al. JOURNAL OF ELECTRONIC MATERIALS
- Atomic origin of high-temperature electron trapping in metal-oxide-semiconductor devices
- (2015) Xiao Shen et al. APPLIED PHYSICS LETTERS
- High Mobility 4H-SiC Lateral MOSFETs Using Lanthanum Silicate and Atomic Layer Deposited SiO2
- (2015) Xiangyu Yang et al. IEEE ELECTRON DEVICE LETTERS
- Improved bias-temperature instability characteristics in SiC metal-oxide-semiconductor devices with aluminum oxynitride dielectrics
- (2014) Atthawut Chanthaphan et al. APPLIED PHYSICS LETTERS
- Accurate analysis of indium–zinc oxide thin films via laser-induced breakdown spectroscopy based on plasma modeling
- (2013) Emanuel Axente et al. JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
- Influence of Molecular Structure on the Laser-Induced Plasma Emission of the Explosive RDX and Organic Polymers
- (2013) Frank C. De Lucia et al. JOURNAL OF PHYSICAL CHEMISTRY A
- Laser ablation methods for analysis of urinary calculi: Comparison study based on calibration pellets
- (2013) K. Štěpánková et al. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
- Influence of metal substrates on the detection of explosive residues with laser-induced breakdown spectroscopy
- (2012) Jennifer L. Gottfried APPLIED OPTICS
- Analysis of the absorption layer of CIGS solar cell by laser-induced breakdown spectroscopy
- (2012) Seok H. Lee et al. APPLIED OPTICS
- Analysis of indium zinc oxide thin films by laser-induced breakdown spectroscopy
- (2011) A. C. Popescu et al. JOURNAL OF APPLIED PHYSICS
- Laser-induced breakdown spectroscopy for photovoltaic silicon wafer analysis
- (2011) S. Darwiche et al. PROGRESS IN PHOTOVOLTAICS
- New world record efficiency for Cu(In,Ga)Se2 thin-film solar cells beyond 20%
- (2011) Philip Jackson et al. PROGRESS IN PHOTOVOLTAICS
- Laser-Induced Breakdown Spectroscopy (LIBS), Part I: Review of Basic Diagnostics and Plasma—Particle Interactions: Still-Challenging Issues within the Analytical Plasma Community
- (2010) David W. Hahn et al. APPLIED SPECTROSCOPY
- Structural and optical properties of thin films of Cu(In,Ga)Se2 semiconductor compounds
- (2010) A. V. Mudryi et al. Journal of Applied Spectroscopy
- Laser-induced breakdown spectroscopy for detection of explosives residues: a review of recent advances, challenges, and future prospects
- (2009) Jennifer L. Gottfried et al. ANALYTICAL AND BIOANALYTICAL CHEMISTRY
- Light-induced boron-oxygen defect generation in compensated p-type Czochralski silicon
- (2009) D. Macdonald et al. JOURNAL OF APPLIED PHYSICS
- Investigation on the crystal growth process of spherical Si single crystals by melting
- (2009) Zhengxin Liu et al. JOURNAL OF CRYSTAL GROWTH
- n-Type multicrystalline silicon wafers prepared from plasma torch refined upgraded metallurgical feedstock
- (2009) S. Martinuzzi et al. PROGRESS IN PHOTOVOLTAICS
- Rapid-thermal-anneal-based internal gettering for germanium-doped Czochralski silicon
- (2008) Jiahe Chen et al. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
- Characterization of Carbon-Containing Aerosolized Drugs Using Laser-Induced Breakdown Spectroscopy
- (2008) Dibyendu Mukherjee et al. APPLIED SPECTROSCOPY
- A comparison of laser ablation inductively coupled plasma mass spectrometry, micro X-ray fluorescence spectroscopy, and laser induced breakdown spectroscopy for the discrimination of automotive glass
- (2008) Benjamin E. Naes et al. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
- Quantitative analysis of carbonaceous aerosols using laser-induced breakdown spectroscopy: a study on mass loading induced plasma matrix effects
- (2007) Dibyendu Mukherjee et al. JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
Find the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
SearchAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started