High mobility transparent conductive Al-doped ZnO thin films by atomic layer deposition

Title
High mobility transparent conductive Al-doped ZnO thin films by atomic layer deposition
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 727, Issue -, Pages 565-571
Publisher
Elsevier BV
Online
2017-08-24
DOI
10.1016/j.jallcom.2017.08.207

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