Low temperature deposition of highly transparent and conducting Al-doped ZnO films by RF magnetron sputtering

Published 2017 View Full Article

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Title
Low temperature deposition of highly transparent and conducting Al-doped ZnO films by RF magnetron sputtering
Authors
Keywords
RF magnetron sputtering, Al-doped ZnO (AZO) thin films, Resistivity, Transmittance, Deposition power, Ar working pressure
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 725, Issue -, Pages 60-68
Publisher
Elsevier BV
Online
2017-07-13
DOI
10.1016/j.jallcom.2017.07.121

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