Atomic layer deposition of Y-stabilized ZrO 2 for advanced DRAM capacitors

Published 2017 View Full Article

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Title
Atomic layer deposition of Y-stabilized ZrO 2 for advanced DRAM capacitors
Authors
Keywords
Y-stabilized ZrO, 2, DRAM capacitor, Atomic layer deposition, High-, k, dielectric, Leakage current
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 722, Issue -, Pages 307-312
Publisher
Elsevier BV
Online
2017-06-08
DOI
10.1016/j.jallcom.2017.06.036

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