Intrinsic microstructure of Si/GaAs heterointerfaces fabricated by surface-activated bonding at room temperature

Published 2017 View Full Article

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Title
Intrinsic microstructure of Si/GaAs heterointerfaces fabricated by surface-activated bonding at room temperature
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 2S1, Pages 02BA01
Publisher
Japan Society of Applied Physics
Online
2017-11-25
DOI
10.7567/jjap.57.02ba01

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