Interlayer coupling effect on the performance of monolithic three-dimensional inverters and its dependence on the interlayer dielectric thickness

Published 2017 View Full Article

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Title
Interlayer coupling effect on the performance of monolithic three-dimensional inverters and its dependence on the interlayer dielectric thickness
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 56, Issue 4S, Pages 04CC02
Publisher
Japan Society of Applied Physics
Online
2017-03-02
DOI
10.7567/jjap.56.04cc02

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