High-temperature and high-speed oxidation of 4H-SiC by atmospheric pressure thermal plasma jet

Title
High-temperature and high-speed oxidation of 4H-SiC by atmospheric pressure thermal plasma jet
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 56, Issue 4, Pages 040304
Publisher
Japan Society of Applied Physics
Online
2017-03-14
DOI
10.7567/jjap.56.040304

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