High-temperature dielectric responses in all-nanosheet capacitors

Published 2017 View Full Article

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Title
High-temperature dielectric responses in all-nanosheet capacitors
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 56, Issue 6S1, Pages 06GH09
Publisher
Japan Society of Applied Physics
Online
2017-06-01
DOI
10.7567/jjap.56.06gh09

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