4.4 Article

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Journal

INTERNATIONAL JOURNAL OF OPTOMECHATRONICS
Volume 11, Issue 1, Pages 47-54

Publisher

TAYLOR & FRANCIS INC
DOI: 10.1080/15599612.2017.1406024

Keywords

Double disk; integrated optics; lithium niobate; microfabrication; microresonator

Funding

  1. National Basic Research Program of China [2014CB921300]
  2. Natural National Science Foundation of China (NSFC) [61590934, 61505231, 61405220, 61327902]
  3. Fundamental Research Funds for the Central Universities
  4. Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34]

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We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-mu m diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 x 10(5) is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

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