Heat transfer and material ablation in hybrid laser-waterjet microgrooving of single crystalline germanium

Published 2017 View Full Article

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Title
Heat transfer and material ablation in hybrid laser-waterjet microgrooving of single crystalline germanium
Authors
Keywords
Laser ablation, Micromachining, Hybrid laser-waterjet, Germanium, Heat transfer, Plasma
Journal
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Volume 116, Issue -, Pages 25-39
Publisher
Elsevier BV
Online
2017-01-06
DOI
10.1016/j.ijmachtools.2017.01.002

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