Crystal structure and mechanical properties of titanium nitride films synthesized by magnetron sputtering with a hot target

Physicochemical model for reactive sputtering of hot target

(2017) Viktor I. Shapovalov et al.   PHYSICS LETTERS A

Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target

(2016) A. E. Lapshin et al.   GLASS PHYSICS AND CHEMISTRY

Structure, mechanical and corrosion properties of TiN films deposited on stainless steel substrates with different inclination angles by DCMS and HPPMS

(2016) F. Jiang et al.   SURFACE & COATINGS TECHNOLOGY

Evaporation factor in productivity increase of hot target magnetron sputtering systems

(2016) G.A. Bleykher et al.   VACUUM

Investigation of localized surface plasmon resonance of TiN nanoparticles in TiN_xO_y thin films

(2016) J. Zhang et al.   Optical Materials Express

Mapping of mechanical properties of nanostructured materials using a piezoresonance probe

(2015) I. I. Maslenikov et al.   INSTRUMENTS AND EXPERIMENTAL TECHNIQUES

Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering

(2014) M. E. Konischev et al.   Russian Physics Journal

Effect of process parameters on properties of argon–nitrogen plasma for titanium nitride film deposition

(2013) Partha Saikia et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

A nonisothermal physicochemical model of synthesis of oxynitrides by reactive sputtering techniques

(2012) A. A. Barybin et al.   GLASS PHYSICS AND CHEMISTRY

Scratch hardness evaluation within-situpile-up effect estimation

(2012) A.S. Useinov et al.   PHILOSOPHICAL MAGAZINE

Magnetron discharge in an argon-oxygen mixture for deposition of a titanium oxide film

(2012) A. E. Komlev et al.   TECHNICAL PHYSICS

Nanopowders and films of titanium oxide for photocatalysis: A review

(2010) V. I. Shapovalov   GLASS PHYSICS AND CHEMISTRY