Discontinuous pinning effect by a hole row to the gas-liquid interface in a parallel gap

Published 2017 View Full Article

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Title
Discontinuous pinning effect by a hole row to the gas-liquid interface in a parallel gap
Authors
Keywords
Contact line pinning, Discontinuous pinning effect, Gas-liquid interface, Liquid control, Immersion lithography
Journal
EXPERIMENTAL THERMAL AND FLUID SCIENCE
Volume 87, Issue -, Pages 50-59
Publisher
Elsevier BV
Online
2017-04-22
DOI
10.1016/j.expthermflusci.2017.04.022

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