Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems

Published 2017 View Full Article

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Title
Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems
Authors
Keywords
Production, Queueing, Robust production capacity planning, Semiconductor manufacturing, Bi-objective optimization
Journal
EUROPEAN JOURNAL OF OPERATIONAL RESEARCH
Volume 261, Issue 3, Pages 929-940
Publisher
Elsevier BV
Online
2017-02-24
DOI
10.1016/j.ejor.2017.02.026

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