Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology

Published 2016 View Full Article

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Title
Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology
Authors
Keywords
-
Journal
Surface Topography-Metrology and Properties
Volume 4, Issue 3, Pages 034004
Publisher
IOP Publishing
Online
2016-07-04
DOI
10.1088/2051-672x/4/3/034004

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