Molecular beam deposition of high-permittivity polydimethylsiloxane for nanometer-thin elastomer films in dielectric actuators

Published 2016 View Full Article

Authors

Keywords

Dielectric elastomer actuator, Chloropropyl-functional, Vinyl-terminated siloxane co-oligomer, Thermal evaporation, Ultra-violet light curing, Atomic force microscopy, Indentation test, Surface roughness, Spectroscopic ellipsometer

Journal

MATERIALS & DESIGN

Volume 105, Issue -, Pages 106-113

Publisher

Elsevier BV

Online

2016-05-16

DOI

10.1016/j.matdes.2016.05.049

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