Study of Peck drilling of borosilicate glass with μRUM process for MEMS

Published 2016 View Full Article

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Title
Study of Peck drilling of borosilicate glass with μRUM process for MEMS
Authors
Keywords
Micro rotary ultrasonic machining, Vibration frequency, Vibration amplitude, Electroplated diamond tool, Borosilicate glass, Peck drilling, Material removal rate
Journal
Journal of Manufacturing Processes
Volume 22, Issue -, Pages 134-150
Publisher
Elsevier BV
Online
2016-04-01
DOI
10.1016/j.jmapro.2016.02.001

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