Review
Chemistry, Analytical
Michael Huff
Summary: This paper reviews advances in reaction-ion etching (RIE) for high-aspect-ratio microfabrication, highlighting the importance of anisotropic etching for precise control of device dimensions. Newer RIE methods have enabled deeper etches and higher aspect ratios, particularly in the development and production of silicon-based micro- and nano-machined devices.
Review
Engineering, Electrical & Electronic
Rui M. R. Pinto, Ved Gund, Carlos Calaza, K. K. Nagaraja, K. B. Vinayakumar
Summary: This review introduces the wet and dry etching methods for aluminum nitride (AlN) thin-films, and discusses the effects of etching parameters on the overall surface characteristics.
MICROELECTRONIC ENGINEERING
(2022)
Article
Chemistry, Physical
Doo San Kim, Yun Jong Jang, Ye Eun Kim, Hong Seong Gil, Hee Ju Kim, You Jin Ji, Hyung Yong Kim, In Ho Kim, Myoung Kwan Chae, Jong Chul Park, Geun Young Yeom
Summary: In this study, a dual exhaust system was implemented in a reactive ion beam etcher (RIBE) to control the radical flux relative to ion flux during the etching process. The additional exhausting of radicals through the inductively coupled plasma (ICP) source chamber decreased both the ICP source chamber pressure and the ratio of radical flux to ion flux. This control of the radical flux is believed to be beneficial for anisotropic etching of nanoscale features in the next generation RIBE.
APPLIED SURFACE SCIENCE
(2022)
Review
Materials Science, Multidisciplinary
Hsien-Chih Huang, Zhongjie Ren, Clarence Chan, Xiuling Li
Summary: This article reviews the etching of beta-Ga2O3 using various methods, comparing their performance and discussing the challenges faced by these etching techniques for beta-Ga2O3.
JOURNAL OF MATERIALS RESEARCH
(2021)
Article
Chemistry, Analytical
Christian-G. R. Wittek, Lukas Steinhoff, Selina Raumel, Michael Reissfelder, Folke Dencker, Marc C. Wurz
Summary: This article introduces the development of double-edged micro-cutters, consisting of a two-part system of cutter head and shaft. The cutting diameters range from 50 to 200 μm. The silicon carbide cutting heads are manufactured using microsystem technology. The substrate can be uniformly structured via photolithography, allowing for the production of 5200 homogeneous micro-milling heads simultaneously. The etching parameters for the silicon carbide material are analyzed, and the resulting milling heads are tested for functionality and wear.
Article
Chemistry, Multidisciplinary
Roberto Memeo, Mattia Bertaso, Roberto Osellame, Francesca Bragheri, Andrea Crespi
Summary: Femtosecond laser micromachining is an established technique for fabricating complex three-dimensional structures in glass. The combination of laser writing and chemical etching allows for the fabrication of hollow structures and the integration of optical and fluidic components in a single substrate, enabling the development of optofluidic devices for various applications.
APPLIED SCIENCES-BASEL
(2022)
Article
Materials Science, Multidisciplinary
Anton V. Golovanov, Nikolay V. Luparev, Sergey Yu. Troschiev, Sergei A. Tarelkin, Viktoriia S. Shcherbakova, Vitaly S. Bormashov
Summary: Surface modification of diamond is crucial for the creation of diamond quantum photonics devices. Research shows that using SF6-based plasma for diamond processing can etch diamond faster than traditional methods, and a two-step plasma processing method can produce steep diamond 3D structures suitable for nanophotonics without the need for chlorine.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
(2021)
Article
Materials Science, Multidisciplinary
Yawen Yuan, Yishi Wang, Shasha Liu, Xuxue Zhang, Xinzheng Liu, Changhui Sun, Dong Yuan, Yan Zhang, Xiaorong Cao
Summary: Direct growth of high-quality graphene films on glasses by chemical vapor deposition (CVD) method has emerged as a promising route to produce smart glass equipment, with tunable quality, excellent film uniformity, and potential scalability. CF4 plasma etching-assisted CVD method enables the direct synthesis of superhydrophobic light-transmitting graphene glass, with excellent hydrophobicity and transmittance, showing great potential in transparent conductors, smart windows, simple heating devices, and solar-cell electrode fields.
Article
Chemistry, Multidisciplinary
Khakimjon Saidov, Ivan Erofeev, Zainul Aabdin, Antoine Pacco, Harold Philipsen, Antony Winata Hartanto, Yifan Chen, Hongwei Yan, Weng Weei Tjiu, Frank Holsteyns, Utkur Mirsaidov
Summary: A method of precise and uniform wet etching for molybdenum (Mo) and other metals is presented, which overcomes the challenge of non-uniform etch profiles in wet chemical etching of polycrystalline metals. This method combines multiple cycles of cryo-oxidation and selective oxide dissolution to achieve the desired smooth and uniform nanostructures.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Materials Science, Multidisciplinary
Subrata Mandal, Chirantan Das, Subhrajit Sikdar, Basudev Nag Chowdhury, Pintu Singha, Aritra Banerjee, Anupam Karmakar, Sanatan Chattopadhyay
Summary: In this study, a substrate engineered patterned array of square-shaped features of size 1.5 μm x 1.5 μm, comprising of <111>/[100]-planes of p-Si substrate, was successfully developed using electron beam lithography assisted selective anisotropic wet etching. The exposed <111>/[100]-planes were confirmed by FESEM imaging and X-ray diffraction study. The surface engineered Si-substrates have potential applications in electronic, optoelectronic, and bio-sensing devices.
MATERIALS CHEMISTRY AND PHYSICS
(2022)
Article
Engineering, Electrical & Electronic
Thomas R. Jones, Alden Fisher, Douglas W. Barlage, Dimitrios Peroulis
Summary: This article presents a millimeter-wave solid-state waveguide switch fabricated using bulk silicon micromachining, with a photogenerated plasma within a silicon post as the switching element. The switch offers high OFF-state isolation and low insertion loss, making it suitable for high-performance millimeter-wave waveguide systems.
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
(2021)
Article
Nanoscience & Nanotechnology
Seunghwan Lee, Hye-Mi Kim, GeonHo Baek, Jin-Seong Park
Summary: In the field of semiconductor production, as the technology node of devices becomes smaller, area selective deposition (ASD) has become a promising technique for addressing overlay or self-alignment issues. Utilizing molecular layer deposition (MLD) for conformal deposition in ASD can effectively address the limitations of traditional materials and processes.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Article
Materials Science, Multidisciplinary
Christoph Weigel, Valeriya Cherkasova, Mathias Holz, Hai Binh Phi, Christian Goerner Tenorio, Bjoern Wilbertz, Leonard Vossgrag, Thomas Froehlich, Steffen Strehle
Summary: This article introduces the application of ultralow expansion (ULE) glasses in micromechanical systems, discusses the importance of manufacturing technological parameters for system design, and uses microcantilevers as basic mechanical elements to evaluate technological parameters and other impact factors. The implemented models allow the prediction of micromechanical system properties, providing effective support for system design.
ADVANCED ENGINEERING MATERIALS
(2023)
Article
Materials Science, Ceramics
Weijie Zhou, Rao Li, Min Li, Pan Tao, Xunsi Wang, Shixun Dai, Baoan Song, Wei Zhang, Changgui Lin, Xiang Shen, Tiefeng Xu, Peiqing Zhang
Summary: This paper presents the fabrication of microlens arrays with good optical quality using wet-etching assisted femtosecond laser direct writing technology. The microlenses exhibit a wide range of diameters and achieve uniform dense stacking in the mid-infrared wavelength range. The fabricated microlens arrays have significant applications in cutting-edge mid-infrared fields.
CERAMICS INTERNATIONAL
(2022)
Article
Materials Science, Multidisciplinary
Jingxiu Ding, Ruipeng Zhang, Yuchun Li, David Wei Zhang, Hongliang Lu
Summary: The study found that adding macromolecular additives in aluminum wet etching process can effectively reduce the horizontal etching rate, improve the undercut problem during metal patterning, and enhance the selection ratio between horizontal and vertical etching rates.
Article
Engineering, Electrical & Electronic
Cao Xia, Dong F. Wang, Takahito Ono, Toshihiro Itoh, Ryutaro Maeda
Summary: A slope-based working mechanism is used to overcome the effect of slowly changing excitation amplitude on sensing performance. By increasing modal damping, the energy transfer between coupled modes is decreased, resulting in a flat roof on the amplitude response curve that is independent of both excitation amplitude and frequency. The flat roof tilts with applied mass perturbations, and its slope is independent of excitation amplitude but dependent on the applied mass perturbations. A proposed excitation insensitive mass sensing scheme is confirmed through theoretical and numerical results, showing high linearity within a certain mass range.
IEEE SENSORS JOURNAL
(2022)
Article
Polymer Science
M. M. I. Megat Hasnan, G. P. Lim, N. Nayan, C. F. Soon, A. A. Abd Halim, M. K. Ahmad, S. M. Said, M. S. Mohamed Ali, I. M. Noor
Summary: MXenes are promising two-dimensional materials for sensors with high conductivity and super hydrophilicity. This study investigates the use of Ti2CTX MXenes in detecting Chlorpyrifos in a P-channel ion-sensitive field-effect transistor. Composite thin films containing Ti2CTX MXene show higher sensitivity in Cpy detection compared to films without MXene.
Article
Energy & Fuels
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
Summary: This study demonstrates a self-powered wireless IoT sensing system that uses daily ambient temperature energy harvesting. By utilizing a thermoelectric generator and a phase change material, the temperature difference is converted into electricity, enabling the system to sense and transmit ambient temperature and humidity.
Article
Thermodynamics
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Megat Muhammad Ikhsan Megat Hasnan, Masaya Toda, Ioana Voiculescu, Suhana Mohd Said, Takahito Ono
Summary: This work demonstrates thermal-to-electric energy conversion based on ionic nanofluidic transport in nano channels induced by a temperature gradient. The performance of the thermally ionic nanofluidic energy harvesting system in cases with and without nanochannels has been evaluated and compared. The results confirm the advantage of nanochannels on energy conversion and the influence of nanochannel materials on power density.
ENERGY CONVERSION AND MANAGEMENT
(2022)
Article
Materials Science, Ceramics
Yulia Eka Putri, Nova Andriani, Tio Putra Wendari, Suhana Mohd Said, Diana Vanda Wellia, Refinel, Arif Hidayat, Nofrijon Sofyan
Summary: This paper explores the controllable solvothermal synthesis of well-defined strontium titanate (SrTiO3) nanocubes with tunable morphology using CTAB and TBA. The addition of CTAB and TBA affects the transformation and formation of the SrTiO3 nanocubes. XRD data and refinement analysis show shape-dependent tuning in lattice parameters. CTAB and TBA interact electrostatically with SrTiO3, confirmed by specific absorption peaks in the IR spectrum. HRTEM images reveal the uniform shape, sharp edges, flat faces, and narrow size distribution of the nanocubes. The electrical conductivity in bulk samples with uniform nanocubes is three times higher compared to non-uniform nanocubes.
CERAMICS INTERNATIONAL
(2023)
Review
Chemistry, Inorganic & Nuclear
N. A. A. M. Amin, S. M. Said, M. F. M. Salleh, A. M. Afifi, N. M. J. N. Ibrahim, M. M. I. M. Hasnan, M. Tahir, N. Z. I. Hashim
Summary: This paper reviews the spin-crossover (SCO) behavior of metal complexes involving d4-d7 first-row transition metals and their applications in functional devices. It particularly focuses on the performance of Fe-based SCO materials in electronic devices. This review provides an understanding that can guide the further optimization of Fe-based SCO technologies in a wide range of electronic applications.
INORGANICA CHIMICA ACTA
(2023)
Article
Engineering, Electrical & Electronic
Mohamed Bashir Ali Bashir, Ethar Yahya Salih, Suhana Mohd Said, Yuzuru Miyazaki, Dhafer Abdul-Ameer Shnawah, M. Nasir Bashir, Imran Haider Sajid, Mohamed Hamid Elsheikh
Summary: In this study, filled-skutterudite materials InxLa0.25Co4Sb12 were synthesized using mechanical alloying and spark plasma sintering techniques. The presence of InSb nanoinclusions was found to significantly reduce the electrical resistivity and lattice thermal conductivity, leading to an enhancement in the dimensionless figure-of-merit (ZT).
JOURNAL OF ELECTRONIC MATERIALS
(2023)
Article
Polymer Science
Muhammad Alamgeer, Muhammad R. Tahir, Mahidur Sarker, Shabina Ali, Shahid Hussian, Sajad Ali, Muhammad Imran Khan, Dil Nawaz Khan, Rashid Ali, Suhana Mohd Said
Summary: The combination of polyaniline (PANI) and zinc oxide (ZnO) nanoparticles in different ratios was used to prepare PANI/ZnO nanocomposites, which significantly improved the performance of polymer-based photovoltaic devices. The nanocomposites were characterized using various techniques, such as X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), Fourier transform infrared (FTIR) spectroscopy, UV-vis absorption, energy dispersive X-ray (EDX), and I-V measurements. The results showed that the PANI/ZnO nanocomposites exhibited enhanced optical and electrical properties, with a high power conversion efficiency (PCE) of 4.48% achieved for the PANI/ZnO (3 wt%) nanocomposites.
Article
Chemistry, Multidisciplinary
Nur 'Adnin Akmar Zulkifli, Nor Hilmi Zahir, Atiena Husna Abdullah Ripain, Suhana Mohd Said, Rozalina Zakaria
Summary: We successfully grew high-quality, large-area and uniform few-layer MoS2 on p-GaN using a simplified sulfurization technique. Tuning the sulfurization parameters improved MoS2 orientation and quality. An n-MoS2/p-GaN heterostructure PD with high performance was successfully built.
NANOSCALE ADVANCES
(2023)
Article
Chemistry, Multidisciplinary
H. C. Hassan, S. M. Said, I. M. Noor, M. M. I. Megat Hasnan, R. Zakaria, N. M. J. Nik Ibrahim, F. Salleh, I. A. Fadzallah, N. L. Md. Noor, N. Abdullah
Summary: It has been found that Fe-based spincrossover molecular complexes exhibit spincrossover behavior and ultrahigh Seebeck coefficients when subjected to heat. In this study, the correlation between the ligand length of the SCO complex and the bandgap energy, ionic conductivity, and Seebeck voltage were investigated using UV-vis spectrometry. These findings provide a molecular understanding of the optical and electronic characteristics of SCO complexes, which is crucial for the utilization of SCO in energy conversion and sensors.
MOLECULAR CRYSTALS AND LIQUID CRYSTALS
(2023)
Article
Materials Science, Multidisciplinary
Yi-Te Huang, Takahito Ono
Summary: Amorphous TbFeCo films were deposited by electroplating. The magnetostriction performance of the films was investigated using cantilevered bilayer structures. The results showed that the TbFeCo films with Tb composition below 1.5 at% exhibited positive magnetostriction, while those with Tb composition higher than 1.5 at% exhibited negative magnetostriction. It was also observed that the addition of Tb element caused a measurable change in magnetization curves for the negative magnetostriction films.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
(2023)
Article
Materials Science, Multidisciplinary
Yi-Te Huang, Takahito Ono
Summary: The magnetostriction and volume magnetostriction of sputtered amorphous Tb20Fe24Co56 (TFC) films were investigated. The largest magnetostriction coefficient and volume magnetostriction of the TFC films were found to be 54 and 48 ppm, respectively. The study highlights the potential of TFC films for microdevices utilizing the volume magnetostriction effect.
MATERIALS RESEARCH EXPRESS
(2023)
Article
Materials Science, Multidisciplinary
Yin-Chen Huang, Ioana Voiculescu, Takahito Ono
Summary: The aim of this study was to evaluate the magnetostriction performance of FeGa thin films synthesized by different methods. It was found that the electrodeposited films exhibited tensile stress, while the ion-beam sputtered film showed compressive stress. Both films had an in-plane easy axis of magnetization and (1 1 0)-oriented polycrystalline structures. The volume magnetostriction of the ion-beam sputtered film was approximately one-third of the Joule magnetostriction, while the electrodeposited film had lower magnetostriction values.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
(2023)
Article
Engineering, Electrical & Electronic
Haiteng Ma, Shaokang Chen, Dong F. Wang, Jin Wang, Takahito Ono
Summary: A coupled symmetrical MF-AFM cantilever is proposed to achieve high imaging resolution through regulating the energy transfer among harmonics, while frequency-shift multiplication and noise suppression brought by internal resonance also help to uplift imaging resolution.
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
(2023)
Proceedings Paper
Engineering, Electrical & Electronic
Chan Cheng Hou, Nguyen Van Toan, Takahito Ono
Summary: This study reports the fabrication and evaluation of a high-density micro-thermoelectric generator using electrodeposition, which has the potential to harvest energy from a small temperature difference for microdevices.
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)
(2022)