Ultrathin Titanium Dioxide Nanolayers by Atomic Layer Deposition for Surface Passivation of Crystalline Silicon

Published 2016 View Full Article

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Title
Ultrathin Titanium Dioxide Nanolayers by Atomic Layer Deposition for Surface Passivation of Crystalline Silicon
Authors
Keywords
-
Journal
IEEE Journal of Photovoltaics
Volume 6, Issue 3, Pages 649-653
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-04-09
DOI
10.1109/jphotov.2016.2545404

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