Influence of Metal–Organic Vapor Phase Epitaxy Reactor Environment on the Silicon Bulk Lifetime

Title
Influence of Metal–Organic Vapor Phase Epitaxy Reactor Environment on the Silicon Bulk Lifetime
Authors
Keywords
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Journal
IEEE Journal of Photovoltaics
Volume 6, Issue 6, Pages 1668-1672
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-10-11
DOI
10.1109/jphotov.2016.2598254

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