High-resolution, high-linearity temperature sensor using surface acoustic wave device based on LiNbO3/SiO2/Si substrate

Title
High-resolution, high-linearity temperature sensor using surface acoustic wave device based on LiNbO3/SiO2/Si substrate
Authors
Keywords
-
Journal
AIP Advances
Volume 6, Issue 9, Pages 095317
Publisher
AIP Publishing
Online
2016-09-24
DOI
10.1063/1.4963797

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