Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM

Title
Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM
Authors
Keywords
-
Journal
AIP Advances
Volume 6, Issue 3, Pages 035128
Publisher
AIP Publishing
Online
2016-03-31
DOI
10.1063/1.4945405

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