Optimization of femtosecond laser processing of silicon via numerical modeling

Published 2016 View Full Article

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Title
Optimization of femtosecond laser processing of silicon via numerical modeling
Authors
Keywords
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Journal
Optical Materials Express
Volume 6, Issue 9, Pages 2745
Publisher
The Optical Society
Online
2016-08-05
DOI
10.1364/ome.6.002745

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