Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications

Published 2016 View Full Article

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Title
Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications
Authors
Keywords
-
Journal
IEEE Photonics Journal
Volume 8, Issue 5, Pages 1-11
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-08-20
DOI
10.1109/jphot.2016.2601782

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