The improvement of high power impulse magnetron sputtering performance by an external unbalanced magnetic field

Published 2016 View Full Article

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Title
The improvement of high power impulse magnetron sputtering performance by an external unbalanced magnetic field
Authors
Keywords
High power impulse magnetron sputtering, External magnetic field, Target discharge current, Substrate ion current, Optical emission spectroscopy
Journal
VACUUM
Volume 133, Issue -, Pages 98-104
Publisher
Elsevier BV
Online
2016-09-09
DOI
10.1016/j.vacuum.2016.08.020

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