Influence of Si content on the microstructure and mechanical properties of VSiN films deposited by reactive magnetron sputtering

Published 2016 View Full Article

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Title
Influence of Si content on the microstructure and mechanical properties of VSiN films deposited by reactive magnetron sputtering
Authors
Keywords
Microstructure, Solid solution, Mechanical properties, Model
Journal
VACUUM
Volume 131, Issue -, Pages 51-57
Publisher
Elsevier BV
Online
2016-06-02
DOI
10.1016/j.vacuum.2016.05.030

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