Cross-sectional atom probe tomography sample preparation for improved analysis of fins on SOI

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Title
Cross-sectional atom probe tomography sample preparation for improved analysis of fins on SOI
Authors
Keywords
Atom probe tomography, Silicon on insulator, finFET, Reconstruction
Journal
ULTRAMICROSCOPY
Volume 161, Issue -, Pages 105-109
Publisher
Elsevier BV
Online
2015-12-01
DOI
10.1016/j.ultramic.2015.11.013

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